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    Copy mask 規(guī)格

    
    
    

    

    

    

    Copy mask 規(guī)格
    


    1、Mask size (Unit: mm)
    


    Soda lime: 3006、4009、5009、6009、6012
    
Quartz：5009、6009
    


     
    


    2、Mask Specification (Unit: um)
    


    
	
		
    
			Grade
			E
			D
			C
			B
			A
		
    
		
    
			CD
			±0.50
			±0.75
			±1.0
			±1.5
			±2.0
		
    
		
    
			Defect
			<10.0
			<10.0
			<10.0
			<10.0
			<10.0
		
    
	    

    

    

    

    

    


    
 
    

    
    
    
    
    
    
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